Abstract

We demonstrate a > 10 milligram, fiber-packaged, ultra-high-sensitivity nano-optomechanical MEMS accelerometer using an intrinsically differential Mach-Zehnder strain-sensing interferometer with 10 μ g/Hz resolution up to 100 kHz. The differential readout is insensitive to wavelength and temperature over ~40 nm and ~30 degree ranges, respectively.