Using the Temperature Degree of Freedom to Prevent Overfitting in Infrared Spectroscopic Ellipsometry

Abstract

We performed high-precision measurements of the mid-infrared (5–25 µm) optical properties of fused-silica glass, from room temperature to 600 °C, using variable-angle spectroscopic ellipsometry. We developed a technique that limits overfitting of ellipsometric data using the additional information available via the temperature-dependent measurements.