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Ultraprecision CMP for sapphire, GaN, and SiC for advance... | ResearchHub
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Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials
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Authors
Hideo Aida
7 more
Hideo Aida
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Toshiro Doi
5 more
•
Michio Uneda
Published
February 20, 2012
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Journal
Current Applied Physics
Topics
Physics
Materials Science
Engineering
Quantum Mechanics
Optics
Show all topics
DOI
10.1016/j.cap.2012.02.016
