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How illumination treatment affects on copper-assisted che... | ResearchHub
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How illumination treatment affects on copper-assisted chemical etching of silicon wafers
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Authors
Huanlun Tong
5 more
Huanlun Tong
•
T.P. Ma
3 more
•
Wenhui Ma
Published
December 1, 2024
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Journal
Applied Surface Science
Topics
Materials Science
Materials Chemistry
Biomedical Engineering
Electrical And Electronic Engineering
Layer (Electronics)
Show all topics
DOI
10.1016/j.apsusc.2024.162030
