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AlN piezoelectric thin films for energy harvesting and acoustic devices
Biomedical Engineering
Materials Chemistry
Physics
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Authors
Chunlong Fei
,
Xiangli Liu
Benpeng Zhu
,
Di Li
,
X. Yang
,
Yintang Yang
+4 authors
,
Qifa Zhou
Journal
Nano Energy
Published
Jun 19, 2018
DOI
10.1016/j.nanoen.2018.06.062
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