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The effect of a closed back cavity on air-coupled piezoel... | ResearchHub
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The effect of a closed back cavity on air-coupled piezoelectric micromachined ultrasonic transducer performance
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Authors
Yi Gong
6 more
Yi Gong
•
Miaojie Liu
4 more
•
Menglun Zhang
Published
January 6, 2025
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Journal
Nanotechnology and Precision Engineering
Topics
Physics
Materials Science
Engineering
Mechanics Of Materials
Radiology, Nuclear Medicine And Imaging
Show all topics
DOI
10.1063/10.0034714
License
CC-BY
Other Formats
PDF
Supporters
Support the authors with ResearchCoin
Tip RSC
Journal
Nanotechnology and Precision Engineering
Topics
Physics
Materials Science
Engineering
Mechanics Of Materials
Radiology, Nuclear Medicine And Imaging
Show all topics
DOI
10.1063/10.0034714
License
CC-BY
Other Formats
PDF