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Isolating the Role of Photoionization for Copolymer Prese... | ResearchHub
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Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron–Ion Coincidence Experiments
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Authors
Faegheh Sajjadian
9 more
Faegheh Sajjadian
•
Valentin Laffert
7 more
•
Fabian Holzmeier
Published
January 13, 2025
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Journal
ACS Applied Polymer Materials
Topics
Physics
Materials Science
Chemistry
Medicine
Quantum Mechanics
Show all topics
DOI
10.1021/acsapm.4c03223
