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Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron–Ion Coincidence Experiments
Electrical And Electronic Engineering
Surfaces, Coatings And Films
Physics
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Authors
Faegheh Sajjadian
,
Valentin Laffert
D. Singh
,
Laura Galleni
,
Ivan Pollentier
,
R. Richter
,
Michiel Setten
,
Stefan Gendt
,
Thierry Conard
+7 authors
,
Fabian Holzmeier
Journal
ACS Applied Polymer Materials
Published
Jan 13, 2025
DOI
10.1021/acsapm.4c03223
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